Micro and Nano Manufacturing facility
Dr. Muralidhar Ghantasala is the director of É«É«À² Michigan University's micro/nano fabrication facility with a Class 100 clean room. The facility is housed in Floyd Hall, home to the College of Engineering and Applied Sciences, on É«É«À²'s Parkview Campus.
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Graduate students work on their projects in the Class 100 clean room facility in the College of Engineering and Applied Sciences building at É«É«À².
This facility includes the following equipment:
- Spinner
- Hot plates
- Convection oven
- Optical microscope
- Electroplating
- Wet etching
- Microbalance and MA 45 Mask Aligner
The micro- and nano-manufacturing facility also includes a thin films laboratory which houses:
- Dual Magnetron Sputtering with DC/RF sputter sources
- Thermal Evaporation system
- RF Plasma CVD system
- MW Plasma CVD system
- Etching facilities (Reactive Ion Etching), and
- Excimer laser micromachining (for patterning, etching, and/or polymer microfluidics channel fabrication)
- 3-D Printing (Poly Lactic Acid-PLA or ABS)
For more information
Dr. Muralidhar K. Ghantasala
Department of Mechanical and Aerospace Engineering
É«É«À² Michigan University
(269) 276-3388 | Email Ghantasala
Research Projects
Research projects encompass the following research areas.
- Torque sensors for automotive applications
- Nanoparticle drug delivery systems and applications – Lab-on-chip Devices
- CNT/graphene based sensors for different applications
- Fuel Cell catalyst layers – Graphene oxide based materials
Team
- Dr. Muralidhar K. Ghantasala, director
- Vivek Iddum, post graduate research associate
- Hassan Shirzadi, doctoral student